JPH0331073Y2 - - Google Patents
Info
- Publication number
- JPH0331073Y2 JPH0331073Y2 JP1353587U JP1353587U JPH0331073Y2 JP H0331073 Y2 JPH0331073 Y2 JP H0331073Y2 JP 1353587 U JP1353587 U JP 1353587U JP 1353587 U JP1353587 U JP 1353587U JP H0331073 Y2 JPH0331073 Y2 JP H0331073Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- section
- holding
- support
- holding part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 95
- 230000032258 transport Effects 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 description 13
- 238000004528 spin coating Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1353587U JPH0331073Y2 (en]) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1353587U JPH0331073Y2 (en]) | 1987-01-30 | 1987-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121434U JPS63121434U (en]) | 1988-08-05 |
| JPH0331073Y2 true JPH0331073Y2 (en]) | 1991-07-01 |
Family
ID=30802683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1353587U Expired JPH0331073Y2 (en]) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331073Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4642692B2 (ja) * | 2006-05-08 | 2011-03-02 | 東京エレクトロン株式会社 | 基板処理システム |
-
1987
- 1987-01-30 JP JP1353587U patent/JPH0331073Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63121434U (en]) | 1988-08-05 |
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